diff --git a/distutils_rust/__init__.py b/distutils_rust/__init__.py
--- a/distutils_rust/__init__.py
+++ b/distutils_rust/__init__.py
@@ -116,8 +116,9 @@
 
         src = os.path.join(self.get_temp_path(ext), self.get_temp_output(ext))
         dest = self.get_output_filename(ext)
-        shutil.copyfile(src, dest)
-        shutil.copymode(src, dest)
+        desttmp = dest + '.tmp'
+        shutil.copy(src, desttmp)
+        shutil.move(desttmp, dest)
 
 Distribution.rust_ext_modules = ()
 build.sub_commands.append(